White Light Interferometry (WLI)

Capabilities: Non-contact method for surface height measurement of 3-D structures with surface profiles varying from tens of nanometers to centimeters.

Equipment Model: Bruker Contour GT K

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Problems addressed: Non-contact measurement of surface, Surface roughness (Ra), Step height, surface characterizations of micro electrical mechanical systems (MEMS).

Advantages: Quick analysis, non-contact, nm range height resolution.